Thin-film growth services

Research areas
  • Physical Sciences

Gorka Pazos
External-Services Manager
+34 943 57 40 00

Available for external users?
Access protocol

CIC nanoGUNE offers External Services with the aim of supporting the characterization and fabrication of materials and micro and nanoscale devices for both academic and industrial users. The External Services Department is designed to be an open facility for researchers and technologists from different business and research fields.
The services offered by the External Services Department can be carried out by qualified nanoGUNE personnel or requested under a self-service mode.
Please contact the External Services Department staff.


Our facilities give the possibility to grow films or coatings of a wide variety of materials, such as metals, semiconductors, and dielectrics in different types of substrates with precise thicknesses, starting from a few atomic layers to micron-size thicknesses. The thin films can be deposited in substrates of up to 4 inch diameter.


Ultra high vacuum magnetron sputtering
High quality single or multiple layer thin film growth
Alloy thin film growth with determine stoichiometry
Nitride and oxide growth of thin film by reactive sputtering
Possibility to grow single crystal thin film
Deposition or post-deposition treatment (annealing, Ar plasma cleaning of the surface)

E-beam/thermal evaporation
Single or multiple layer thin film growth
Combination of by e-beam or thermal evaporation

Deposition or post-deposition treatment
Table top basic sputtering
Thin film growth of metals for basic coatings or contact fabrication
Carbon coating of the specimen

Atomic layer deposition
Deposition of wide variety of materials (Al2O3, HfO2, ZnO, TiO2 and other oxides, nitrides and metals) on flat substrates (e.g. Si wafer) or high aspect ratio substrates (porous foams, fibers…).


Tolosa Hiribidea, 76
E-20018 Donostia – San Sebastian