Nanofabrication Platform

• Physical Sciences

Contact for external services

Protocol / GCS

• Protocol for CIC nanoGUNE nanoscience external services (self-service / service mode – equipment usage).
• General Conditions for Services (IP-nanoGUNE).
• General Conditions for Services (IP-shared).
• General Conditions for Services (IP-client).

A nanofabrication platform based on an ISO Class 7 cleanroom (Class 10,000), covering the entire micro- and nanoscale prototyping cycle: lithography, deposition, etching, and metrology. It enables the development and validation of nanodevices for electronics, photonics, and biomedical applications, with technical support for process development and the transfer of technologies to reproducible prototypes.

Equipment

• 300 m² cleanroom (ISO Class 7 / Class 10,000)
• Raith eLine Plus electron-beam lithography system
• UV photolithography with masks and alignment
• Thermal and electron-beam evaporation and sputtering systems for metal deposition
• Atomic layer deposition (ALD) system
• Reactive ion etching (RIE) system
• Metrology equipment (profilometry, optical inspection, and microscopy)
• Annealing furnaces and handling stations

• Custom prototyping and fabrication of nanodevices
• Development and execution of lithography, deposition, and etching processes
• Fabrication of electronic, optical, and biomedical structures
• Access to cleanroom facilities with technical support
• Training and supervision in the use of nanofabrication equipment

CIC nanoGUNE

Tolosa Hiribidea, 76, E-20018 Donostia / San Sebastián

Electronics and Embedded Systems:

- Digital Technologies

- Cleanroom Facilities

Application sectors

• Capital equipment
• Capital equipment / Metalworking industry
• Electronics and microtechnology

Industry plan

• IRABAZI · Advanced Manufacturing