Micro/nanofabrication and integration cleanroom

• Engineering & Technology

Tel:+34 943 206 744

A cleanroom facility designed for both micro/nanofabrication (using photolithography) and integration and handling operations under controlled cleanroom conditions.

It enables the processing and assembly of components requiring strict control of airborne particles, temperature and humidity. The facility also supports the fabrication of patterns and microstructures using photolithographic techniques, as well as the assembly of electronic and optical components under controlled environmental conditions.

Equipment

• Laminar flow cabinets and workbenches
• Wet benches
• Standard photolithography equipment, including spin coaters, mask aligners and curing ovens
• Basic inspection and verification equipment, including optical microscopy and profilometry
• Environmental monitoring systems (airborne particles, temperature and humidity)
• Precision assembly tools and fixtures

• High-precision 2D and 3D laser micromachining and texturing
• Large-area digital photonic manufacturing through parallel multi-beam processing
• Development of functional surface structures with high repeatability, including those designed to modify friction, wettability and optical properties
• Characterisation and fine-tuning of laser processing mechatronic systems using six-degree-of-freedom (6-DoF) metrology
• Feasibility studies and process scaling for digital photonic manufacturing technologies in industrial sectors

TEKNIKER
Technology Park, Iñaki Goenaga, 5, 20600, Eibar (Gipuzkoa)

Cleanroom Facilities:

- Biomedical Engineering

- Advanced Materials

Application sectors

• Aerospace
• Aeronautics and space
• Electronics and optics
• Machine tools
• Micro- and nanotechnology
• Healthcare and medical technology (MedTech)

Industry plan

• HAZI · Aerospace