- Engineering & Technology
(+34) 946 430 850 (International calls)
TECNALIA's Micro- and Nanofabrication Laboratory provides capabilities for designing, integrating and validating surface and coating solutions within the manufacturing sector.
The facility incorporates key equipment, including a spin-spray coater, an EVG620 mask aligner (for photolithography, UV nanoimprint lithography (UV-NIL) and micro-contact printing), and a Dispermat SL12-C ball mill.
Its services include micro- and nanofabrication prototyping, lithographic patterning and surface modification.
The laboratory aims to accelerate technological development and facilitate technology transfer to industrial environments through pilot projects, comparative testing and expert technical support.
Equipment
- Spin-spray coater. Equipment for deposition processes with a controlled thickness of the deposited layer.
- EVG 620 Mask Aligner lithography equipment for defining micro- and nanometre-sized structures (up to about 100 nm). Techniques: Photolithography, UV Nil and micro contact printing.
- Dispermat SL12-C VMA-Getzmann horizontal bead mill with a zirconium oxide grinding system and a 1-l double-walled stainless steel container. Nanoparticle dispersions of less than 1 micron can be achieved.
- Plasmalab 80plus (Oxford Instruments) plasma etcher: reactive-ion etching (RIE) equipment for the attack of metal oxides, Ti, photoresins.
- Ultra pure water accessible at various points. The water purification system consists of 2 Elix5 UV and Milli-Q IQ Element modules.
- Fume cupboards for handling solvents.
- Olympus BS51 optical microscope with polarised light, differential interference contrast (DIC) (Nomarski) and fluorescence.
- Size separation system based on an Asymmetrical flow field-flow fractionation (AF4) channel coupled to a MALS detector (WYATT Technologies), which makes it possible to characterise the size distribution of nanomaterials in a solution, particle diameters and concentration.
- Micro- and nanofabrication prototyping
- Lithographic patterning
- Surface modification
- Nanomaterial characterization
- R&D support in a controlled environment
Aimed at:
- Research groups and companies to carry out R&D and innovation based on applying micro and nanotechnologies and manufacturing processes hosted in a clean environment to achieve innovative solutions.
TECNALIA
Gipuzkoa Science and Technology Park, Mikeletegi Pasealekua, 2, E-20009, Donostia-San Sebastián (Gipuzkoa)
Surfaces and Coatings:
- Functional Materials and Surfaces
- Advanced Materials
Application sectors
- Aerospace
- Aeronautics and space
- Automotive
- Biorefineries
- Railways
- Foundries and steelmaking
- Petrochemicals
- Chemical, petrochemical and biorefinery industries
- Healthcare and medical devices
Industry plan
- HAZI · Aerospace
- HAZI · Renewable fuels
- IRABAZI · Automotive components
- IRABAZI · Metallurgy
