- Physical Sciences
Telephone: (+34) 943 212800 Fax: (+34) 943 213076
The most important facility of the Microelectronics and Microsystems Section is the Clean Room. This facility is divided in 4 rooms of different classifications, 10.000, 1000 and 100 Class. All the microelectronics processes are completed in the clean room.
2 Sputtering systems PVD: EDWARDS & PFEIFFER Plasma-lab Oxford PECVD ATV LPCVD Ink-jet printing system for thick film deposition Plasma-lab Oxford RIE UV photolithography and double side mask aligner Laser interference nanlithography system Spinning system for photo-resist deposition Three Ovens: P and N diffusion, thermal oxidation and annealings Silicon Micromachining Wet Bench Porous Silicon Wet Bench Anodic Bonding System Wafer dicing Kulicke & Soffa series 4500 Wire Bonder Atomic Force Microscope AFM Tecnor Profilometer
CEIT Miramon Building Parque Tecnológico de San Sebastián Paseo Mikeletegi, Nº 48 20009, Donostia - San Sebastián - Gipuzkoa SPAIN