Scanning Electron Microscope - FEI - QUANTA 200FEG

Our Quanta 200 FEG (FEI) scanning electron microscope (SEM) was installed at CIC Energigune in the winter of 2010. It is a high resolution environmental microscope capable of running in 3 different modes: high vacuum, variable pressure and environmental modes, which means that it can handle all specimens even uncoated, non-conductive samples as well as wet samples that require being above the vapor pressure of water. The combination of high output thermal field emission (> 100nA beam current) with a high sensitivity (18 mm) allows get final resolution until 3-5 nm. The presence of a backscatter detector also will allow us measure electronic properties like the atomic contrast in our samples. The working voltages of the Quanta 200 FEG (FEI) scanning electron microscope vary between 3kV (low vacuum mode) and 30 kV (high vacuum mode). One key of our Quanta 200 FEG (FEI) SEM is that is it possible work at very low electron probe energies providing images of samples exhibiting low conductivities.