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CLEAR ROOM ENVIRONMENT

Keywords: 
CEIT , clear room , microelectronic , microsystems , Bioengineering , Optics , Chemical and Physical Characterization

Clean-room

Research Area: 
Physical Sciences
Engineering & Technology
Life & Medical Sciences
Location: 

CEIT

Miramon Building

Parque Tecnológico de San Sebastián
Paseo Mikeletegi, Nº 48
20009, Donostia - San Sebastián - Gipuzkoa
SPAIN

Website: 
Contact: 

Telephone: (+34) 943 212800
Fax: (+34) 943 213076

Available for external users?: 
Yes
Description: 

The most important facility of the Microelectronics and Microsystems Section is the Clean Room. This facility is divided in 4 rooms of different classifications, 10.000, 1000 and 100 Class.
All the microelectronics processes are completed in the clean room.

Services: 

2 Sputtering systems PVD: EDWARDS & PFEIFFER
Plasma-lab Oxford PECVD
ATV LPCVD
Ink-jet printing system for thick film deposition
Plasma-lab Oxford RIE
UV photolithography and double side mask aligner
Laser interference nanlithography system
Spinning system for photo-resist deposition
Three Ovens: P and N diffusion, thermal oxidation and annealings
Silicon Micromachining Wet Bench
Porous Silicon Wet Bench
Anodic Bonding System
Wafer dicing
Kulicke & Soffa series 4500 Wire Bonder
Atomic Force Microscope AFM
Tecnor Profilometer